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BMT Superlok

Custom Vacuum Chambers and UHV Chambers


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Description

At BMT Fluid Components, we offer designing and manufacturing custom vacuum chambers to meet your exact requirements. Mount everything you need, exactly where you need it, and get your process or experiment running smoothly.

We also offer a range of standard vacuum chamber templates to help reduce design time and keep costs competitive. Our product line includes high vacuum chambers, ultra-high vacuum (UHV) chambers, and a full selection of accessories.

Material Options:

  • Stainless Steel
  • Acrylic
  • Aluminum
  • Mu-metal

Every chamber is 100% inspected and helium leak tested to ensure the highest quality and performance.

 



Box Vacuum Chambers

Stainless Steel Box Chambers for High Vacuum Applications

Our standard box chambers are engineered for high vacuum environments and built from welded stainless steel 304L plates with a precision aluminium alloy door. The door features an O-ring seal in a dovetail groove for reliable performance. These chambers can be easily customized to meet your specific application needs.

Every chamber is cleaned to UHV standards and helium leak tested for guaranteed integrity.


Customization Options

  • Choice of shape and size
  • Chamber construction in 304L, 316, 316L, or 316LN
  • Additional straight, angled, or zero-length ports
  • Left or right-hand door opening
  • Windows with your preferred optics
  • Transparent acrylic door
  • Water-cooling (trace or double wall)
  • Internal stand-offs, bosses, and mounting points
  • RF shielding
  • Powder-coated steel or aluminum profile frames
  • Integrated heaters and manipulators
  • Full range of gauges, pumps, and feedthroughs

 


 

Cylindrical Vacuum Chambers

Custom Cylindrical Chambers for High & Ultra-High Vacuum Applications

Our cylindrical vacuum chambers are designed for high vacuum or ultra-high vacuum environments (depending on flange selection). Constructed from stainless steel 304L tubing, these chambers can be fully customized to meet your application requirements.

Example: The chamber shown is Ø300 mm (Ø12") x 800 mm with two large 300 x 90 mm rectangular windows for reaction observation. Top ports allow atmosphere control and sample access.

All chambers are cleaned to UHV standards and helium leak tested for guaranteed performance.

Customization Options

  • Choice of shape and size
  • Chamber construction in 304L, 316, 316L, or 316LN
  • Additional straight, angled, or zero-length ports
  • Windows with your choice of optic materials
  • Water-cooling (trace or double wall)
  • Internal stand-offs and bosses
  • RF shielding
  • Frames in powder-coated steel or aluminum profile
  • Integrated heaters and manipulators
  • Full range of gauges, pumps, and feedthroughs

Water-Cooled Vacuum Chambers

Precision Temperature Control Solutions

We offer water-cooled vacuum chambers for precise temperature management, supplied with your choice of connectors and hoses.

Cooling Options

  • Double Wall: Dual chamber walls with channels and barriers for controlled water flow
  • Machined Trace: Channel machined into the wall with a welded cover to create the cooling path
  • Welded Trace: Channel welded onto the chamber surface for efficient cooling

Each method offers unique benefits depending on your application. Our team will help you select the best solution.


Load Lock Chambers

Fast-Entry Access for Increased Productivity

Reduce process time and prevent moisture or oxygen contamination by adding a load lock chamber to your vacuum system. These chambers allow quick sample changes while the main process chamber remains under vacuum—essential for UHV systems.

Benefits

  • Save on pump-down time
  • Improve film quality
  • Enable additional pre/post coating processes
  • Fully customizable
  • Delivered on time and cleaned to UHV standards

Options

  • Manual or pneumatic gate valves
  • Gas inlet valves
  • Transfer arms
  • Substrate heating and cooling
  • Plasma cleaning
  • Wide-range pressure gauges (atm. to 10⁻⁸ mbar)
  • Substrate platens from Ø2” to Ø8” in stainless steel, Inconel, ceramic, graphite, SiC³-coated graphite, or molybdenum
  • Dry vacuum pumps (turbomolecular and scroll)

Standard Sizes:

  • DN100CF Load Lock Chamber
  • DN160CF Load Lock Chamber
  • DN200CF Load Lock Chamber
    (Constructed from stainless steel 304L; other materials available on request.)

Payment & Security

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